Web1 aug. 2024 · the implanter, ion slicing by using H ion implantation is preferable for the mass-production of LNOI. It is interesting to compare the defect formation mechanism in He implanted and H implanted LN and to investigate the H evolution in LN. In this study, we investigated the ion slicing of Y-cut LN in comparison with that of the Z-cut LN. Web1 aug. 2024 · The ion slicing of LN is crucial for fabricating the LNOI substrate, and a deep understanding of the slicing mechanism is beneficial to improve the film …
Lithium niobate single crystal thin film resonator with ...
Web15 dec. 2024 · Ion-implantation at liquid nitrogen conditions can ensure that the implanted He + ions were trapped in the vacancies of the damage layer to realize layer-splitting, … Web16 jan. 2024 · Focused ion beam milling (FIB, Helios 5 UX, ThermoFisher Scientific) is used to investigate the cross-section of the devices. We measure sidewall angle, etch depth and trench depth as well as the redeposition on both the +Z and −Z side of the structure. immerse pad shoulder
Single-Crystal Lithium Niobate Films by Crystal Ion Slicing
Web1 nov. 2024 · The fabrication of lithium niobate on insulator on a silicon substrate through ion slicing is advantageous for electronic-photonic integration but is challenging because of ... and S. Sakai, in International Conference on Ion Implantation Technology, Würzburg, Germany, 16 September 2024 (IEEE, Piscataway, NJ, 2024), Vol. 22, p ... WebIn this paper, we focus on ion-slicing of 4-inch InP and 2-inch freestanding (fs-) GaN wafers. In the first section, we will demonstrate how epitaxy-compatible InP-on-Si substrates can be achieved. In the second section, we will address different issues involved in the case of 2-inch fs-GaN. Finally, by using a variety of experimental Web5 nov. 2024 · Lithium niobate has attracted much attention since the 1970s due to its capacity to modify the light by means of an electric control. In this chapter, we review the evolution of electro-optical (EO) lithium niobate waveguides throughout the years, from Ti-indiffused waveguides to photonic crystals. The race toward ever smaller EO … immerse language company